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Wafergard® II SF Mini XL In-Line Gas Filters

Wafergard® II SF Mini XL In-Line Gas Filters

Superior particulate filtration for ultrapure gas system filtration


● Patented stainless steel membrane provide high-efficiency filtration
● Ideal for high-temperature and dynamic-pressure applications
● Excellent compatibility with most ultrapure semiconductor process gases
● For use with inert and reactive gases
● Typical use up to 60 SLPM


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Materials:
Filter element: Patented stainless steel membrane filter
Housing: Electropolished 316L stainless steel
Surface finish interior: <=5 μin Ra
Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec.

 
Downstream cleanliness:
Particles: Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm
Volatiles : <10 ppb moisture

 
Particle retention:
Greater than 99.9999% (6 LRV) removal of all particles at 60 SLPM (referenced at the most penetrating particle size)
 
Removal rating:
>=0.003 μm
 
Operating conditions:
Maximum inlet pressure: 165 bar (2357 PSI) at 20°C
Maximum forward/reverse differential pressure: 140 bar (2000 PSID)
Maximum operating temperature: 460°C at 35 bar (500 PSI)

 
Warranty:
2 year