Wafergard® II SF Mini XL In-Line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
● Patented stainless steel membrane provide high-efficiency filtration
● Ideal for high-temperature and dynamic-pressure applications
● Excellent compatibility with most ultrapure semiconductor process gases
● For use with inert and reactive gases
● Typical use up to 60 SLPM
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Specifications：
Superior particulate filtration for ultrapure gas system filtration
● Patented stainless steel membrane provide high-efficiency filtration
● Ideal for high-temperature and dynamic-pressure applications
● Excellent compatibility with most ultrapure semiconductor process gases
● For use with inert and reactive gases
● Typical use up to 60 SLPM
Download：
Specifications：
| Materials: |
Filter element: Patented stainless steel membrane filter Housing: Electropolished 316L stainless steel Surface finish interior: <=5 μin Ra Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec. |
| Downstream cleanliness: |
Particles: Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm Volatiles : <10 ppb moisture |
| Particle retention: |
Greater than 99.9999% (6 LRV) removal of all particles at 60 SLPM (referenced at the most penetrating particle size) |
| Removal rating: |
>=0.003 μm |
| Operating conditions: |
Maximum inlet pressure: 165 bar (2357 PSI) at 20°C Maximum forward/reverse differential pressure: 140 bar (2000 PSID) Maximum operating temperature: 460°C at 35 bar (500 PSI) |
| Warranty: |
2 year |
