Wafergard® III NF-750 In-Line Gas Filters
Superior particulate filtration for high-purity gas system filtration
● Cleanest, most efficient all-metal filters available
● Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
● Ideal for high-temperature and dynamic-pressure applications
● Typically used for flows up to 750 SLPM
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Specifications：
Superior particulate filtration for high-purity gas system filtration
● Cleanest, most efficient all-metal filters available
● Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
● Ideal for high-temperature and dynamic-pressure applications
● Typically used for flows up to 750 SLPM
Download：
Specifications：
| Materials: |
Filter element: Patented, sintered nickel membrane filter. Housing: Electropolished VAR 316L stainless steel housing Surface finish interior: <=5 μin Ra Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec. Total flow area: 140.0 cm2 |
| Downstream cleanliness: |
Particles(1): Less than 0.03 particles/Liter (<1 particle/ft3) greater than 0.01 μm at 300 SLPM Volatiles: Volatile outgassing of H2O, O2 and THC is below detectable limits (by RGA and FID at room temperature) |
| Particle retention: |
Greater than 99.9999999% (9 LRV) removal of all particles at 300 SLPM, greater than 00.0000% (6 LRV) removal of all particles at 750 SLPM (referenced at the most penetrating particle size) |
| Removal rating: |
>=0.003 μm |
| Operating conditions: |
Maximum flow rate: 750 SLPM Maximum inlet pressure: 52 bar (750 PSI) at 100°C Maximum forward/reverse differential pressure: 7 bar (100 PSID) Maximum operating temperature: Inert gases 400°C at 27.5 bar (400 PSI); Corrosive and reactive gases: 50°C at 52 bar (7500 PSI) |
| Warranty: |
5 year |
| Note: |
(1) Verified at 100 SLPM for 1/4” gasket seal fitting (compatible with VCR® fitting). |
