Wafergard® III NF Mini XL In-Line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
● Cleanest, most efficient all-metal filters available
● Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
● Ideal for high-temperature and dynamic-pressure applications
● Typically used for flows up to 120 SLPM
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Specifications：
Superior particulate filtration for ultrapure gas system filtration
● Cleanest, most efficient all-metal filters available
● Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
● Ideal for high-temperature and dynamic-pressure applications
● Typically used for flows up to 120 SLPM
Download：
Specifications：
| Materials: |
Filter element: Patented, sintered nickel membrane filter. Housing: Electropolished VAR 316L stainless steel housing Surface finish interior: <=5 μin Ra Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec. |
| Downstream cleanliness: |
Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm |
| Particle retention: |
Particle retention: Greater than 99.9999999% (9 LRV) removal of all particles at 120 SLPM (referenced at the most penetrating particle size) |
| Removal rating: |
>=0.003 μm |
| Operating conditions: |
Maximum inlet pressure: 165 bar (2400 PSI)@100°C Maximum forward/reverse differential pressure: 20 bar (290 PSID) Maximum operating temperature: Inert gases 400°C @ 83 bar (1200 PSI); Corrosive and reactive gases: 50°C@165 bar (2400 PSI) |
| Warranty: |
5 year |
