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Chambergard™ BGN Fast Vent Diffusers

Chambergard™ BGN Fast Vent Diffusers

High-volume throughput and rapid venting to atmosphere


● Rapid vent, gentle flow to atmosphere increases system throughput by minimizing load lock vent cycle time
● Provides rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber
● Patented, sintered nickel technology in a compact diffuser unit for excellent particle retention
● Easy installation/retrofit into existing tools with minimal downtime


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規格說明:


Connections:
Connection fitting types: Inlet gasket seal (VCR® compatible) or butt weld. Outlet - ISO NW bulkhead mounting compatible vacuum flange (compatible with standard ISO Quick Fitting, KF or QF, bulkhead clamps), or none (flangeless)
Inlet/outlet: See ordering information

 
Materials:
Diffuser element: Patented, sintered nickel membrane filter
O-ring: Fluorocarbon
Housing: 316L stainless steel
Surface finish internal: <=32 μin Ra

 
Performance:
Downstream cleanliness: Less than 0.003 particles/liter (<1 particle/ft3) greater than 0.01 μm
Removal rating: >=0.003 μm
Reliability: 100,000 cycle reliability at maximum rated inlet pressure at 25°C (77°F)

 
Operating conditions:
Maximum inlet pressure with outlet to vacuum: 4 bar (60 PSID)
Maximum differential pressure: 5 bar (75 PSID)
Maximum operating temperature: 100°C (212°F)

 
Warranty:
5 year or 100,000 cycles