Chambergard™ BGN Fast Vent Diffusers
High-volume throughput and rapid venting to atmosphere
● Rapid vent, gentle flow to atmosphere increases system throughput by minimizing load lock vent cycle time
● Provides rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber
● Patented, sintered nickel technology in a compact diffuser unit for excellent particle retention
● Easy installation/retrofit into existing tools with minimal downtime
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Specifications：
High-volume throughput and rapid venting to atmosphere
● Rapid vent, gentle flow to atmosphere increases system throughput by minimizing load lock vent cycle time
● Provides rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber
● Patented, sintered nickel technology in a compact diffuser unit for excellent particle retention
● Easy installation/retrofit into existing tools with minimal downtime
Download：
Specifications：
| Connections: |
Connection fitting types: Inlet gasket seal (VCR® compatible) or butt weld. Outlet - ISO NW bulkhead mounting compatible vacuum flange (compatible with standard ISO Quick Fitting, KF or QF, bulkhead clamps), or none (flangeless) Inlet/outlet: See ordering information |
| Materials: |
Diffuser element: Patented, sintered nickel membrane filter O-ring: Fluorocarbon Housing: 316L stainless steel Surface finish internal: <=32 μin Ra |
| Performance: |
Downstream cleanliness: Less than 0.003 particles/liter (<1 particle/ft3) greater than 0.01 μm Removal rating: >=0.003 μm Reliability: 100,000 cycle reliability at maximum rated inlet pressure at 25°C (77°F) |
| Operating conditions: |
Maximum inlet pressure with outlet to vacuum: 4 bar (60 PSID) Maximum differential pressure: 5 bar (75 PSID) Maximum operating temperature: 100°C (212°F) |
| Warranty: |
5 year or 100,000 cycles |
