Wafergard® W-Seal Surface-Mount Gas Filters
All-metal W-seal gas filters for ultrapure surface-mount applications
● Entegris’ best filters in a W-seal surface mount design
● Ideal for high-temperature and dynamic-pressure applications
● Available with stainless steel membrane for inert, hydride and CO gases
● Available with nickel membrane for inert and reactive gases
Download：
Specifications：
All-metal W-seal gas filters for ultrapure surface-mount applications
● Entegris’ best filters in a W-seal surface mount design
● Ideal for high-temperature and dynamic-pressure applications
● Available with stainless steel membrane for inert, hydride and CO gases
● Available with nickel membrane for inert and reactive gases
Download：
Specifications：
| Materials: |
Filter element: Stainless steel membrane or patented, sintered nickel membrane Housing, base block and end cap: 316L double-melt stainless steel Surface finish interior: <=5 μin Ra Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec. |
| Downstream cleanliness: |
Particles: Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm Volatiles: Volatile outgassing of H2O, O2 and THC is below detectable limits (by RGA and FID at room temperature) |
| Particle retention: |
Nickel membrane: Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size) Stainless membrane: Greater than 99.9999% (6 LRV) removal of all particles (referenced at the most penetrating particle size) |
| Removal rating: |
>=0.003 μm |
| Operating conditions: |
Maximum operating pressure: 1 MPa (10 bar, 145 PSID) Maximum forward/reverse differential pressure: 1 MPa (10 bar, 145 PSID) Maximum operating temperature: 400°C (752°F) |
