Planargard® CMP Cartridge Filters
Bulk filtration of CMP slurries
●Available in 10”, 20” and 30” cartridges
●Available in a range of sizes from <1 μm to 50 μm
●Graded-density depth filter retains defect-causing agglomerates, removing only those particles that are distruptive
●Designed to work with Chemlock® housings for rapid filter changeout
Bulk filtration of CMP slurries
●Available in 10”, 20” and 30” cartridges
●Available in a range of sizes from <1 μm to 50 μm
●Graded-density depth filter retains defect-causing agglomerates, removing only those particles that are distruptive
●Designed to work with Chemlock® housings for rapid filter changeout
Download：
Specifications：
| Materials: |
Filter element: All-polypropylene construction O-ring: EPR |
| Connection: |
Code 0, 2-222 |
| Maximum operating conditions: |
Maximum forward differential pressure 0.48 MPa (4.8 bar, 70 PSID) at 25°C |
