Guardian® DEV and Guardian Plus HPM Cartridge Filters
High retention, hydrophilic UPE membrane filters for KOH and TMAH based developer solutions and other high pH chemical filtration applications
High retention, hydrophilic UPE membrane filters for KOH and TMAH based developer solutions and other high pH chemical filtration applications
● Hydrophilic UPE membrane: Superior wettability eliminates prewetting and flushing steps, saving time at changeout. Does not dewet in outgassing fluids, increasing equipment uptime.
● Available in retention ratings of 0.05 and 0.1 µm: Multiple retention ratings cover a broad scope of process requirements
● Large membrane surface area: Enables high flow rates in chemical delivery systems, while maintaining excellent ultrafine particle retention and longer lifetime
● Polyethylene construction: Provides excellent chemical compatibility and long lifetime in a cost-effective device
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Specifications：
| Models: |
Guardian DEV Cartridge, Guardian Plus HPM Cartridge, Guardian DEV HPX Disposable |
| Materials: |
Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE) Supports, sleeve, core, end caps: High-density polyethelene (HDPE) Code 0 Double 2-222 o-ring: DEV; EP, E-FKM, Kalrez® 4079, Plus HPM; E-FKM, FER, DEV HPX; N/A Chem-Line™ disposable outer shell: DEV; N/A, Plus HPM; N/A, DEV HPX; Polypropylene |
| Retention rating: |
0.05, 0.1 µm |
| Membrane surface area: |
DEV: 10": 0.85m², 20": 1.7m², 30": 2.55m² Plus HPM: 10"; 1.9m², 20"; 3.8m², 30"; 5.7m² DEV HPX: 10"; 1.1. m², 20"; N/A, 30"; N/A |
| Maximum operating conditions: |
Maximum forward differential pressure: DEV; 0.35 MPa (3.5 bar; 50 psid) @ 25ºC (77ºF) Maximum forward differential pressure: Plus HPM; 0.24 MPa (2.4 bar; 35 psid) @ 25ºC (77ºF) Maximum forward differential pressure: DEV HPX; 0.35 MPa (3.5 bar; 50 psid) @ 20ºC (68ºF) Maximum reverse differential pressure: DEV; 0.25 MPa (2.5 bar; 35 psid) @ 25ºC (77ºF) Maximum reverse differential pressure: Plus HPM; 0.24 MPa (2.4 bar; 35 psid) @ 25ºC (77ºF) Maximum reverse differential pressure: DEV HPX; 0.25 MPa (2.5 bar; 35 psid) @ 20ºC (68ºF) Maximum inlet pressure: DEV; N/A Maximum inlet pressure: Plus HPM; 0.34 MPa (3.4 bar; 50 psid) @ 25ºC (77 ºF) Maximum inlet pressure: DEV HPX Disposable; 0.69 MPa (6.9 bar; 100 psid) @ 20 ºC (68 ºF) Maximum operating temperature: 60ºC (140ºF) |
| Compatibility: |
Recommended for use in ammonium hydroxide, TMAH and low-termperature organic resist strippers Not recommended in chemistries with peroxide or aromatic hydrocarbons. |
