PrimeLock® Fittings
A premium PFA fitting for high-purity and corrosive chemical applications
Entegris has supplied innovative connection technology into the high purity chemical handling markets for over 30 years. Our latest innovation, PrimeLock® fittings are simple, robust and very easy to assemble. With audible and visual indicators, users can quickly verify proper makeup of the connection.
The ultra clean design provides enhanced reliability within your system with an all PFA wetted construction. PrimeLock fittings are fully tested using Entegris' stringent testing and qualification methodology. This extremely robust, clean fitting is the most reliable connection technology on the market.
● Easy to assemble, enabling consistent and repeatable fitting makeup
● All wetted components are PFA with broad chemical compatibility
● Robust thread design with no cross-threading, quick makeup and increased sealing force
● Non wetted insert reduces entrapment, leak points and flow interruptions
● No heat required to flare tubing, saving time and money
● Connection verification ring has audible and visual indication of proper fitting makeup
● All fitting sizes are compatible with high-temperature chemical processes.
Applications
● High-purity, corrosive chemical handling
● Semiconductor applications
- Photolithography
- Bulk chemical delivery
- CMP
- Wet etch and clean
- High-temperature cleaning processes
● Solar, LED, flat panel display
● Excellent performance with low surface tension chemistries
Specifications
Applicable PFA Tube Dimensions
PrimeLock® Cross-section
Fittings Reliability Test Results
Performance Data
Insert Installation Tools
【Handheld Insertion tool】
【PrimeLock® Nut Wrenches】
【Bench Top Insertion Tool】
A premium PFA fitting for high-purity and corrosive chemical applications
Entegris has supplied innovative connection technology into the high purity chemical handling markets for over 30 years. Our latest innovation, PrimeLock® fittings are simple, robust and very easy to assemble. With audible and visual indicators, users can quickly verify proper makeup of the connection.
The ultra clean design provides enhanced reliability within your system with an all PFA wetted construction. PrimeLock fittings are fully tested using Entegris' stringent testing and qualification methodology. This extremely robust, clean fitting is the most reliable connection technology on the market.
● Easy to assemble, enabling consistent and repeatable fitting makeup
● All wetted components are PFA with broad chemical compatibility
● Robust thread design with no cross-threading, quick makeup and increased sealing force
● Non wetted insert reduces entrapment, leak points and flow interruptions
● No heat required to flare tubing, saving time and money
● Connection verification ring has audible and visual indication of proper fitting makeup
● All fitting sizes are compatible with high-temperature chemical processes.
Applications
● High-purity, corrosive chemical handling
● Semiconductor applications
- Photolithography
- Bulk chemical delivery
- CMP
- Wet etch and clean
- High-temperature cleaning processes
● Solar, LED, flat panel display
● Excellent performance with low surface tension chemistries
Specifications
Materials: | Body, insert, nut | PFA | |
Connection verification ring | ETFE | ||
Operating conditions: | Media pressure @ | 21°C (70°F) | 827 kPa (120 PSIG) |
200°C (392°F) | 276 kPa (40 PSIG) | ||
Temperature range (fluid) | 21°– 200°C (70°– 392°F) | ||
Compliant: | RoHS |
Applicable PFA Tube Dimensions
O.D. | O.D. Tolerance | Wall Thickness | Wall Thickness Tolerance |
1/4" (6.35 mm) | ±0.004" (±0.10 mm) | 0.047" (±1.19 mm) | ±0.004" (±0.10 mm) |
3/8" (9.52 mm) | ±0.004" (±0.10 mm) | 0.062" (±1.57 mm) | ±0.005" (±0.13 mm) |
1/2" (12.70 mm) | ±0.005" (±0.13 mm) | 0.062" (±1.57 mm) | ±0.005" (±0.13 mm) |
3/4" (19.05 mm) | ±0.005" (±0.13 mm) | 0.062" (±1.57 mm) | ±0.005" (±0.13 mm) |
1" (25.40 mm) | ±0.005" (±0.13 mm) | 0.062" (±1.57 mm) | ±0.005" (±0.13 mm) |
1 1/4" (31.75 mm) | ±0.007" (±0.18 mm) | 0.075" (±1.90 mm) | ±0.007" (±0.18 mm) |
PrimeLock® Cross-section
Fittings Reliability Test Results
Test Type | Test Conditions | Acceptance Criteria | Results |
Burst pressure | Media pressure increased until leak occurs | No external leakage prior to tube rupturing |
PASS No external leakage |
Cyclic pressure leak test | 1241 kPa (180 PSIG) water @ 23°C (73°F) | No external leakage after 1 million cycles @ 1.5 × rated pressure |
PASS No external leakage |
414 kPa (60 PSIG) hydraulic oil @ 200°C (392°F) | No external leakage after 1 million cycles @ 1.5 × rated pressure |
PASS No external leakage |
|
High pressure leak test |
Submerge fitting Apply nitrogen pressure equaling 80% of the tube burst pressure |
No external leakage allowed |
PASS No external leakage |
Tube pull out test | Apply tensile load to tube/fitting until tube separates from fitting |
1/4" (178 N) 40 lbf 3/8" (400 N) 90 lbf 1/2" (534 N) 120 lbf 3/4" (890 N) 200 lbf 1" (1112 N) 250 lbf 1 1/4" (1557 N) 350 lbf |
PASS |
Chemical testing |
Sulfuric acid Fluorosurfactant Copper sulfate |
No external leakage after 2 million cycles | PASS |
Performance Data
Insert Installation Tools
【Handheld Insertion tool】
【PrimeLock® Nut Wrenches】
【Bench Top Insertion Tool】