GateKeeper® HX Series Gas Purifiers
Superior purity control at ppt levels
● Gas purification improves process consistency, increases product yields and lengthens tool life
● Does not release hydrocarbons that may contaminate the process
● Regenerable – eliminates disposal issues
● Easy to install with no moving parts or heat/power required
檔案下載：
規格說明：
Superior purity control at ppt levels
● Gas purification improves process consistency, increases product yields and lengthens tool life
● Does not release hydrocarbons that may contaminate the process
● Regenerable – eliminates disposal issues
● Easy to install with no moving parts or heat/power required
檔案下載：
規格說明：
| Materials of construction | 316L stainless steel, electropolished 10 Ra | |
| Gases purified: | Hydrogen (H2), nitrogen (N2) and noble gases | |
| Outlet purity: | <100 ppt H2O, O2, CO, CO2 and H2* | |
| Outlet particle filtration: | 70KF to 17MH | 0.003 µm 316L stainless steel |
| 17M | 20 µm 316L stainless steel | |
| Minimum operating pressure: | 13.3 kPa (2 psia) | |
| Leak rating: | 1 X 10-9 atm cc/sec | |
| Maximum inlet challenge of contaminant to maitain product efficiency: | Contact Entegris. The maximum inlet challenge varies by contaminant. | |
| Lifetime: | One (1) year at nominal flow rate at 1 ppm H2O inlet challenge | |
| Maximum operating temperature: | 65ºC (149°F) | |
| *H2 is removed from N2 and noble gases only. | ||
