GateKeeper® Hydride Gas Purifiers
Cost-effective, environmentally friendly gas purification
● Designed for use with NH3, AsH3, PH3, SiH 4, and GeH4. The purifiers remove O2, CO2, H2O and oxidation byproducts to sub-ppb (part-per-billion) levels.
● Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
● Does not release hydrocarbons that may contaminate the process
● Uses ambient temperature purification technology – no power or heat required
● Low pressure drop across purifiers
檔案下載：
規格說明：
Cost-effective, environmentally friendly gas purification
● Designed for use with NH3, AsH3, PH3, SiH 4, and GeH4. The purifiers remove O2, CO2, H2O and oxidation byproducts to sub-ppb (part-per-billion) levels.
● Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
● Does not release hydrocarbons that may contaminate the process
● Uses ambient temperature purification technology – no power or heat required
● Low pressure drop across purifiers
檔案下載：
規格說明：
| Materials of construction: | 316L stainless steel, electropolished 10 Ra |
| Media: | Inorganic |
| Gases purified: | NH3, AsH3, PH3, SiH 4, and GeH4 |
| Outlet purity: | <1 ppb O2, CO2, H2O |
| Outlet particle filtration: | 0.003 μm |
| Maximum differential pressure: | 1379 kPa (200 PSID) |
| Minimum operating pressure: | 101 kPa (14.7 PSIA) |
| Maximum flow rates: | See datasheet. |
| Leak rating: | 1 × 10-9 atm cc/sec. |
| Maximum inlet challenge of H2O to maintain product efficiency: | 10 ppm (part-per million) |
| Lifetime: | One year at nominal flow rate with 1 ppm inlet challenge of moisture |
| Maximum operating temperature: | 65°C (149°F) |
