Planargard® NMB Cartridge Filter
Sub 32 nm node CMP slurry filtration with leading edge of "Nanofiber Continuous Melt-blown" technology
● Various retention ratings
Sub 32 nm node CMP slurry filtration with leading edge of "Nanofiber Continuous Melt-blown" technology
● Various retention ratings
● Nanofiber CMB technology
● Optimized graded depth structure
● CDS and bulk filtration applications
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Specifications：
| Materials: |
Membrane: Polypropylene
Support: Polypropylene
Cartridge o-ring: EPR, Silicon, 2-222
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| Product type: |
NMB |
| Maximum operating conditions: |
Maximum temperature: 80°C (176°F)
Maximum forward differential pressure: 0.48 MPa (4.8 bar, 70 PSI) @ 25°C (77°F)
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