Torrento® X Filter
Best-in-class filtration of aqueous, outgassing, and aggressive acid and base chemistries in sub 22 nm technology nodes. Enables high flow rate and retention performance.
Torrento® X Filter Applications
● Industry: Semiconductor
● Process: Wet Etch and Clean, Facilities
● Chemistry: Aggressive Acids, Aggressive Bases, Resist Stripper
● Installation Point: Point of Tool, Point of Dispense, Bulk
Product Documentation
Product Specifications
Best-in-class filtration of aqueous, outgassing, and aggressive acid and base chemistries in sub 22 nm technology nodes. Enables high flow rate and retention performance.
Torrento® X Filter Applications
● Industry: Semiconductor
● Process: Wet Etch and Clean, Facilities
● Chemistry: Aggressive Acids, Aggressive Bases, Resist Stripper
● Installation Point: Point of Tool, Point of Dispense, Bulk
Product Documentation
Product Specifications
| TORRENTO X SERIES SMALL DISPOSABLES 1000/1500 | TORRENTO X SERIES SMALL DISPOSABLES 3000 | TORRENTO ATE/AT3 CARTRIDGES CHEM-LINE™ I AND II | TORRENTO ATE/AT3 DISPOSABLES | ||
| Materials: | Membrane: | PFA | Prewet, nondewetting PTFE | ||
| Supports, shell | PFA | PFA | |||
| Catridge o-ring options | - | E-FKM, E-ETP, Kalrez® (6375UP) | - | ||
| Surface area: |
1000 type — 0.10 m² (1.1 ft²) 1500 type — 0.19 m²(2.05 ft²) |
0.44 m² (4.74 ft²) | |||
| Rentention rating: | 10 nm | ||||
| Membrane area: | - | ATE 10" | 2 m² (21 ft²) | ||
| AT3 10" | 3 m² (32 ft²) | ||||
| Cartridge connections: | Code 0 (2-222) o-rings | ||||
| Maximum operating conditions: | Maximum operating pressure: | 0.59 MPa (5.9 bar; 86 psi) @ 25°C (77°F) | 0.58 MPa (5.8 bar, 84 psi) @ 25°C (77°F) | ||
| 0.19 MPa (1.9 bar; 28 psi) @ 95°C (203°F) | 0.097 MPa (0.97 bar, 14 psi) @ 200°C (392°F) | ||||
| Maximum forward differential pressure | 0.39 MPa (3.9 bar; 57 psi) @ 25°C (77°F) | 0.44 MPa (4.4 bar; 64 psi) @ 25°C (77°F) | |||
| 0.05 MPa (0.52 bar, 7.5 psi) @ 200°C (392°F) | |||||
| Maximum reverse pressure | 0.29 MPa (2.9 bar; 42 psi) @ 25°C (77°F) | 0.34 MPa (3.45 bar, 50 psi) @ 25°C (77°F) | |||
| Maximum operating temperature: | 95°C (203°F) | 200°C (392°F) | |||
| Metallic extractables: | UCM Clean | Testing conducted for 16 metals | |||
| X-UCM clean* | Testing conducted for 23 metals | Testing conducted for 23 metals | |||
| Other extractables: | UCM Clean | TOC, CI | |||
| X-UCM clean* | TOC, CI, F | TOC, CI, F (for 10 nm) | TOC, CI, F |
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