Torrento® S Filter
Best-in-class, leading-edge filtration of solvents and BEOL chemistries in sub 22 nm technology nodes. Enables high flow rate and retention performance.
Torrento® S Filter Applications
● Industry: Semiconductor, Chemical Manufacturing
● Process: Wet Etch and Clean, Facilities
● Chemistry: Solvent
● Installation Point: Point of Tool, Point of Dispense, Bulk
Product Documentation
Product Specifications
Best-in-class, leading-edge filtration of solvents and BEOL chemistries in sub 22 nm technology nodes. Enables high flow rate and retention performance.
Torrento® S Filter Applications
● Industry: Semiconductor, Chemical Manufacturing
● Process: Wet Etch and Clean, Facilities
● Chemistry: Solvent
● Installation Point: Point of Tool, Point of Dispense, Bulk
Product Documentation
Product Specifications
| TORRENTO S SERIES ATE/AT3/ATF CARTRIDGES | TORRENTO S SERIES 10 NM ATE/AT3/ATF CHEM-LINE I AND II | ||
| Materials: | Membrane: | Prewet, nondewetting PTFE | |
| Supports | PFA | ||
| Catridge o-ring options | E-FKM, E-ETP, Kalrez® (6375UP) | - | |
| Shell | PFA | ||
| Retention rating: | 10 nm | ||
| Membrane area: | 10" | ATE 10" 2 m² (21 ft²) | |
| ATE 10" 2.4 m² (25.8 ft²) | |||
|
ATF 10" 2.4 m2 (25.8 ft2) ATF 20" Cartridges 4.8 m2 (51.7 ft2) |
ATF 20" Disposables N/A | ||
| Cartridge connections: | Code 0 (2-222) o-rings | ||
| Maximum operating conditions: | Maximum operating pressure: | 0.58 MPa (5.8 bar; 84 psi) @ 25°C (77°F) | |
| 0.097 MPa (0.97 bar; 14 psi) @ 200°C (392°F) | |||
| Maximum forward differential pressure | 0.44 MPa (4.4 bar; 64 psi) @ 25°C (77°F) | ||
| 0.05 MPa (0.52 bar, 7.5 psi) @ 200°C (392°F) | |||
| Maximum reverse pressure | 0.34 MPa (3.45 bar, 50 psi) @ 25°C (77°F) | ||
| Maximum operating temperature: | 200°C (392°F) | ||
| Metallic extractables: | UCM-16 clean | Testing conducted for 16 metals | |
| Other extractables (prewet only): | UCM-16 clean | TOC, CI, NVR |
| TORRENTO S SERIES 10 NM SMALL DISPOSABLES 1500/3000 | ||
| Membrane area: | 10" | 1500 type 0.19 m² (2.05 ft²) |
| 3000 type 0.44 m² (4.74 ft²) | ||
| Maximum operating conditions: | Maximum operating pressure: | 0.59 MPa (5.9 bar, 86 psi) @ 25°C (77°F) |
| 0.19 MPa (1.9 bar, 28 psi) @ 95°C (203°F) | ||
| Maximum forward differential pressure | 0.39 MPa (3.9 bar; 57 psi) @ 25°C (77°F) | |
| 0.19 MPa (1.9 bar; 28 psi) @ 95°C (203°F) | ||
| Maximum reverse pressure | 0.29 MPa (2.9 bar; 42 psi) @ 25°C (77°F) | |
| Maximum operating temperature: | 95°C (203°F) | |
|
Notes: For solvents, select the "Dry" option. For aqueous-solvent blends, select the "Prewet" option. All Torrento S-series 10 nm filter configurations are PFOA free. |
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