QuickChange® Liquid Filters
Advanced filtration of aqueous, outgassing, and aggressive acid and base chemistries in 28 nm or greater technology nodes. Enables high flow rate and retention performance.
Advanced filtration of aqueous, outgassing, and aggressive acid and base chemistries in 28 nm or greater technology nodes. Enables high flow rate and retention performance.
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Specifications：
Specifications：
| Materials: | Membrane | Prewet, nondewetting PTFE | |||||
| Supports | PFA | ||||||
| For Cartridge Filters | |||||||
| Cartridge connections | Code 0 (AS568-222) o-rings | ||||||
| Cartridge o-ring | E-FKM, E-ETP, Chemraz® or Kalrez® | ||||||
| Key (cartridge with Chemlock® key only) | PFA | ||||||
| For Disposable Filters | |||||||
| Shell | PFA | ||||||
| Retention rating: |
15 nm (NXT, NXE, NXF, NXG) 30 nm, 0.05 µm, 0.1 µm, 0.2 µm (NXT, NXX, NXM, NXE) |
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| Membrane area: | NXT | NXX | NXM | NXE | NXM | NXG | |
| 30 nm, 0.05 µm, 0.1 µm, 0.2 µm | |||||||
| 4" | – |
0.5 m2 (5.4 ft2) |
– | – | – | – | |
| 10" |
0.9 m2 (9.7 ft2) |
1.3 m2 (14 ft2) |
1.8 m2 (19.4 ft2) |
2.2 m2 (23.7 ft2) |
– | – | |
| 20" |
1.8 m2 (19.4 ft2) |
2.6 m2 (28 ft2) |
3.6 m2 (38.8 ft2) |
4.4 m2 (47.4 ft2) |
– | – | |
| 30" |
2.7 m2 (29 ft2) |
– | – | – | – | – | |
| 15 nm | |||||||
| 10" |
0.9 m2 (9.7 ft2) |
_ | _ |
2 m2 (21.5 ft2 |
2.4 m2 (25.8 ft2 |
3 m2 (32.3 ft2) | |
| 20" |
1.8 m2 (19.4 ft2) |
– | – |
4 m2 (43.1 ft2) |
4.8 m2 (51.7 ft2) |
6 m2 (64.6 ft2) | |
| Maximum operating conditions: | Maximum operating pressure |
0.58 MPa (5.8 bar, 84 psi) @ 25ºC (77°F) 0.097 MPa (0.97 bar, 14 psi) @ 200ºC (392°F) |
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| Maximum forward differential pressure |
0.44 MPa (4.4 bar, 64 psi) @ 25ºC (77°F) 0.05 MPa (0.52 bar, 7.5 psi) @ 200ºC (392°F) |
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| Maximum reverse pressure | 0.34 MPa (3.45 bar, 50 psi) @ 25ºC (77°F) | ||||||
| Maximum operating temperature | 200°C (392°F) | ||||||
| Metallic extractables: | Standard and UCM-16:Testing conducted for 23 metals | ||||||
| Other extractables: |
Standard and UCM-16: TOC, Cl, F |
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