Microgard™ PI Bulk High-Viscosity Filters
Bulk high-viscosity photochemical filter with good flow rate and contaminant retention performance in 45 -90 nm technology nodes.
Bulk high-viscosity photochemical filter with good flow rate and contaminant retention performance in 45 -90 nm technology nodes.
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Specifications：
Specifications：
| Materials: | Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE) |
| Supports, core and sleeve: High-density polyethylene (HDPE) | |
| O-rings: Fluoropolymer encapsulated Viton® fluoroelastomer (TEV) O-rings | |
| Connections: | Code 0 (2-222) |
| Membrane area: | 0.2 µm: 8,800 cm2 (9.47 ft2) |
| 0.5 µm: 8,000 cm2 (8.6 ft2) | |
| Maximum operating conditions: | Maximum inlet pressure: 0.39 MPa (3.9 bar, 56.6 PSID) at 25°C |
| Maximum forward differential pressure: 0.39 MPa (3.9 bar, 56.6 psid) at 25°C | |
| Maximum reverse differential pressure: 0.255 MPa (2.55 bar, 39.3 psid) at 25°C | |
| Maximum operating temperature: 60°C (140°F) | |
| Retention efficiency: | 0.2 µm: >99.999% retention of 0.198 µm PSL beads |
| 0.5 µm: >99.999% retention of 0.55 µm PSL beads |
