Guardian™ ECD Cartridge Filters
Hydrophilic, high-flow inert membrane with excellent flow/retention properties, ideal solution for wet cleans and CuECD
● Provide excellent chemical compatibility, downstream chemical cleanliness, reduced system startup times and long lifetime
● Highly hydrophilic surfaces reduce the potential for microbubble formation
● High-flow asymmetric membrane delivers excellent performance while minimizing system pressure drop
● Non-interactive surfaces will not react with typical plating additives and related process chemistries – ensures ultimate process protection
檔案下載：
規格說明：
Hydrophilic, high-flow inert membrane with excellent flow/retention properties, ideal solution for wet cleans and CuECD
● Provide excellent chemical compatibility, downstream chemical cleanliness, reduced system startup times and long lifetime
● Highly hydrophilic surfaces reduce the potential for microbubble formation
● High-flow asymmetric membrane delivers excellent performance while minimizing system pressure drop
● Non-interactive surfaces will not react with typical plating additives and related process chemistries – ensures ultimate process protection
檔案下載：
規格說明：
| Materials: |
Membrane: Hydrophilic polyethersulfone (PES) Supports, core and sleeve: High-density polyethylene (HDPE) O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer o-ring (TEV) |
| Connections: |
Code 0 (2-222) |
| Membrane area: |
10000 cm2 (10.76 ft2) |
| Maximum operating conditions: |
Maximum forward/reverse differential pressure:0.34 MPa (3.4 bar; 49 PSID) at 25°C (77°F) Maximum operating temperature: 60°C (140°F) |
| Compatibility: |
Optimized for electrochemical deposition processes |
