Panelgard™ 1-2-3 PDP Disposable Filters
Advanced filtration for point-of use flat panel and photolithography applications
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Specifications：
Advanced filtration for point-of use flat panel and photolithography applications
Download：
Specifications：
| Materials: |
Membrane: Polypropylene Supports: Polypropylene O-ring: Perfluoroelastomer, EPDM Shell: Polypropylene |
| Membrane Area: |
Short : 1.2um,2.5um 1,300 cm2 (201.5 in2) / 5.0um 1,700 cm2 (263.5 in2) Long : 1.2um,2.5um 2,300 cm2 (356.5 in2) / 5.0um 3,000 cm2 (465 in2) |
| Maximum Operating Conditions: |
Maximum Inlet Pressure: 0.39 MPa (3.9 bar; 56.6 psi) @ 25° C Maximum Forward/Reverse Differential Pressure: 0.27 MPa (2.7 bar; 39.2 psi) @ 25° C Maximum Operating Temperature: 40° C |
