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Intercept® HPX, HPM and HSM Disposable Filters

Intercept® HPX, HPM and HSM Disposable Filters

Hydrophilic dual-capture membrane for superior particle removal in batch baths, single wafer tools, and chemical delivery systems in a high-flow filter
 
● Dual-particle capture mechanism - patented hydrophilic membrane structure provides enhanced particle removal capabilities
● High flow hydrophilic membrane with large filtration area provides rapid particle removal and microbubble control for faster bath startup/system qualification and increased yields
● Extreme cleanliness in terms of particle shedding and metal extractables
● High sieving retention at filter's rating
● Available in a variety of retention ratings from 0.2 µm down to 20 nm to cover a broad scope of process requirements
 
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規格說明:

Materials:
Membrane:
- HP, HPX and HPM: Hydrophilic ultra-high molecular weight polyethylene (UPE)
- HSM: Hydrophilic Polysulfone (PS)
Supports, core and sleeve: High-density polyethylene (HDPE)
Disposables' outer shell:
- Chem-Line™ II: Polypropylene
- Chem-Line I: PFA
Flaretek® nuts: PVDF
Cartridges: Code 0 double 2-222 o-rings: Teflon® Encapsulated Viton® (TEV) or Kalrez® 4079

 
Fittings:
Chem-Line II: Inlet/outlet: 3/8", 1⁄2", 3⁄4” or 1” Flaretek® fittings or compatible
Chem-Line I: Inlet/outlet: T-line 3/4" Super Type Pillar® and 3/4" or 1" Super 300 Type Pillar
Vents and drains: 1/4” Flaretek® fittings or compatible

 
Membrane area:
HP 10": 0.85 m2
HPX 4": 0.5 m2; HPX 10": 1.1 m2; HPX 20": 2.2 m2
HPM 10": 1.9 m2
HSM 10": 1.05 m2

 
Maximum operating conditions:
Maximum forward differential pressure: 0.34 MPa (3.4 bar, 50 PSID) at 25°C; 0.21 MPa (2.1 bar, 30 PSID) at 70°C
Maximum reverse differential pressure: 0.21 MPa (2.1 bar, 30 PSID) @ 25°C
Maximum operating temperature: 70°C (at the above conditions)