Panelgard™ 1-2-3 UPE Disposable Filters
Advanced filtration for point-of use flat panel and photolithography applications
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Specifications:
Advanced filtration for point-of use flat panel and photolithography applications
Download:
Specifications:
Materials: |
Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE) Supports: High-density polyethylene (HDPE) O-ring: Perfluoroelastomer Shell: Polypropylene |
Membrane Area: |
Short : 1,600 cm2 (248 in2) Long : 3,000 cm2 (465 in2) |
Maximum Operating Conditions: |
Maximum Inlet Pressure: 0.39 MPa (3.9 bar; 56.6 psi) @ 25° C Maximum Forward/Reverse Differential Pressure: 0.27 MPa (2.7 bar; 39.2 psi) @ 25° C Maximum Operating Temperature: 40° C |