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ProcessGard® NP Cartridge Filters

ProcessGard® NP Cartridge Filters

Depth filters with high flow and excellent broad range retention efficiency, ideal for flat panel display prefiltering and semiconductor Bulk CMP filtration applications


● Multi-stage, graded density design delivers superior particle and gel holding capability
● Superior retention of colloids and particles ensuring low particle counts to protect your process
● Polypropylene construction offers excellent chemical and heat resistance (polypropylene and glass fibers are used for 0.5 μm and 1.0 μm filters)
● A full range of retention ratings with high retention efficiency lets you optimize for your specific process stream
● Applications include wet etching, stripping, developer, cleaning


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規格說明:


Materials:
Membrane: Polypropylene (all 0.5 μm and 1.0 μm filters have some glass fibers included)
Supports: Polypropylene supports, cage, core, and sleeves and end caps
O-rings: Ethylene propylene (EP) o-ring or gasket standard; Viton® fluoroelastomer, and Teflon® fluoropolymer encapsulated Viton® fluoroelastomer o-ring (TEV)

 
Connection:
Code 0 (2-222), or Code F (flat gasket)
 
Maximum operating conditions:
Maximum differential pressure: 0.483 MPa (4.83 bar, 70 PSID) at 25°C
Maximum operating temperature: 80°C