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Wafergard® Max 1000 In-Line Teflon® Gas Filter

Wafergard® Max 1000 In-Line Teflon® Gas Filter

Superior particulate filtration for ultrapure gas applications - PTFE membrane


● Large filtration area - 3X larger filtration, low pressure drop and high flow
● Same length dimension as current filter generation, eliminating design changes of the gas panel or delivery system
● Extended filter lifetime - 3X longer than earlier generation and reduced cost of ownership (COO)


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規格說明:


Materials:
Hydrophobic PTFE membrane supported by molded Teflon® PFA structures
Housing: 316L stainless steel
O-ring: Encapsulated fluoroelastomer (E-FKM)

 
Surface finish interior:
≥25 µin Ra
 
Removal rating:
≥99.9999999% removal of ≥0.003 µm particles in gas
 
Downstream cleanliness:
< 0.03 particles/liter (<1 particle/ft³) > 0.01 µm
 
Maximum operating conditions:
Maximum inlet pressure: 9.8 bar (142 PSIG)
Maximum forward differential pressure: 3.9 bar (57 PSID)
Maximum reverse differential pressure: 2.5 bar (36 PSID)
Maximum operating temperature: 120°C (248°F)

 
Helium leak rating:
1 x 10 (-10) Pa.m³/sec
 
Warranty:
1 year