Wafergard® Max 1000 In-Line Teflon® Gas Filter
Superior particulate filtration for ultrapure gas applications - PTFE membrane
● Large filtration area - 3X larger filtration, low pressure drop and high flow
● Same length dimension as current filter generation, eliminating design changes of the gas panel or delivery system
● Extended filter lifetime - 3X longer than earlier generation and reduced cost of ownership (COO)
檔案下載:
規格說明:
Superior particulate filtration for ultrapure gas applications - PTFE membrane
● Large filtration area - 3X larger filtration, low pressure drop and high flow
● Same length dimension as current filter generation, eliminating design changes of the gas panel or delivery system
● Extended filter lifetime - 3X longer than earlier generation and reduced cost of ownership (COO)
檔案下載:
規格說明:
Materials: |
Hydrophobic PTFE membrane supported by molded Teflon® PFA structures Housing: 316L stainless steel O-ring: Encapsulated fluoroelastomer (E-FKM) |
Surface finish interior: |
≥25 µin Ra |
Removal rating: |
≥99.9999999% removal of ≥0.003 µm particles in gas |
Downstream cleanliness: |
< 0.03 particles/liter (<1 particle/ft³) > 0.01 µm |
Maximum operating conditions: |
Maximum inlet pressure: 9.8 bar (142 PSIG) Maximum forward differential pressure: 3.9 bar (57 PSID) Maximum reverse differential pressure: 2.5 bar (36 PSID) Maximum operating temperature: 120°C (248°F) |
Helium leak rating: |
1 x 10 (-10) Pa.m³/sec |
Warranty: |
1 year |