Wafergard® MAX In-Line Teflon® Gas Filters
Superior particulate filtration for ultrapure gas applications
● All Teflon® filter element provides the industry’s best performance for ultrapure applications
● Excellent compatibility with all classes of semiconductor process gases as well as general nitrogen and CDA applications
● Specifically designed for high flow and low delta pressure applications
● For use with inert and reactive gases, including ozone
● Pre-conditioned for fast startup (Silver only)
● Select ultrahigh purity (Silver) or high purity (Bronze) surface finish
檔案下載：
規格說明：
Superior particulate filtration for ultrapure gas applications
● All Teflon® filter element provides the industry’s best performance for ultrapure applications
● Excellent compatibility with all classes of semiconductor process gases as well as general nitrogen and CDA applications
● Specifically designed for high flow and low delta pressure applications
● For use with inert and reactive gases, including ozone
● Pre-conditioned for fast startup (Silver only)
● Select ultrahigh purity (Silver) or high purity (Bronze) surface finish
檔案下載：
規格說明：
| Materials: |
Filter element: Hydrophobic Teflon® PTFE membrane supported by molded Teflon® PFA structures Housing: Electropolished low sulfur 316L stainless housing Surface finish interior: Bronze <=20 μin Ra; Silver <=7 μin Ra Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec. |
| Downstream cleanliness: |
Particles: Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm Volatiles (Silver) : <10 ppb H2O and O2. Below LDL THC (lower detection limit is 5 ppb) |
| Particle retention: |
Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size) |
| Removal rating: |
>=0.003 μm |
| Operating conditions: |
Maximum inlet pressure: Silver and Bronze 1⁄4" and 1⁄2" VCR® compatible fittings: 4.0 MPa (40 bar, 580 PSIG); Silver butt weld and Bronze 1⁄4" Swagelok® compatible fittings: 7.0 MPa (70 bar, 1015 PSIG); Bronze 1⁄2" and 3⁄8" Swagelok® compatible fittings: 7.5 MPa (75 bar, 1088 PSIG) Maximum forward differential pressure: 7 bar (102 PSID) Maximum operating temperature: 120°C (248°F) |
| Warranty: |
Bronze: 1 year Silver: 3 years |
