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Wafergard® II F Micro In-Line Gas Filter

Wafergard® II F Micro In-Line Gas Filter

All-stainless steel gas filters for ultra-high purity gas filtration


● Optimized high flow and high-retention 316L stainless steel filter element with 3x flow rate and 3-digit retention efficiency improvement over filter element
● Standard size - ease of installation without design changes of gas panel or delivery system
● All 316L stainless steel construction
● Filter of choice for high-purity gas systems
● Excellent gas compatibility with most semiconductor gases
● Ideal for high-termperature and dynamic pressure applications


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規格說明:


Materials:
Membrane, housing: 316L stainless steel
 
Surface finish interior:
≥5 µin Ra
 
Removal rating:
≥99.9999999% removal of ≥0.003 µm particles in gas @200 SLM
 
Downstream cleanliness:
Cleanliness <0.03 µm particles/L > 0.01 µm
 
Operating conditions:
Maximum operating pressure: 53 bar (768 PSIG)
Maximum differential pressure: 9.8 bar (142 PSIG)
Maximum operating temperature: 460°C (860°F)

 
Helium leak rating:
9 x 10 (-10) Pam³/sec
 
Warranty:
2 years