Wafergard® II F Micro In-Line Gas Filter
All-stainless steel gas filters for ultra-high purity gas filtration
● Optimized high flow and high-retention 316L stainless steel filter element with 3x flow rate and 3-digit retention efficiency improvement over filter element
● Standard size - ease of installation without design changes of gas panel or delivery system
● All 316L stainless steel construction
● Filter of choice for high-purity gas systems
● Excellent gas compatibility with most semiconductor gases
● Ideal for high-termperature and dynamic pressure applications
Download：
Specifications：
All-stainless steel gas filters for ultra-high purity gas filtration
● Optimized high flow and high-retention 316L stainless steel filter element with 3x flow rate and 3-digit retention efficiency improvement over filter element
● Standard size - ease of installation without design changes of gas panel or delivery system
● All 316L stainless steel construction
● Filter of choice for high-purity gas systems
● Excellent gas compatibility with most semiconductor gases
● Ideal for high-termperature and dynamic pressure applications
Download：
Specifications：
| Materials: |
Membrane, housing: 316L stainless steel |
| Surface finish interior: |
≥5 µin Ra |
| Removal rating: |
≥99.9999999% removal of ≥0.003 µm particles in gas @200 SLM |
| Downstream cleanliness: |
Cleanliness <0.03 µm particles/L > 0.01 µm |
| Operating conditions: |
Maximum operating pressure: 53 bar (768 PSIG) Maximum differential pressure: 9.8 bar (142 PSIG) Maximum operating temperature: 460°C (860°F) |
| Helium leak rating: |
9 x 10 (-10) Pam³/sec |
| Warranty: |
2 years |
