Fluorogard® RS Cartridge Filters
PTFE membrane filter for photoresist residue removal applications
● High-capacity multiple layer, membrane optimized structure and layering technology
● Available in cartridges and disposable filters. Disposables available with Flaretek®, Pillar® and Flowell® compatible fittings
● Provides excellent gel and small particle retention in a single cartridge design
● High-flow cartridge design with optimized membrane pleating
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Specifications：
Fluorogard® P-RS Pre-filters
PTFE membrane filter for photoresist residue removal applications
● High-capacity multiple layer, membrane optimized structure and layering technology
● Available in cartridges and disposable filters. Disposables available with Flaretek®, Pillar® and Flowell® compatible fittings
● Provides excellent gel and small particle retention in a single cartridge design
● High-flow cartridge design with optimized membrane pleating
Download：
Specifications：
Fluorogard® P-RS Pre-filters
| Materials: |
Membrane: nonwoven PTFE Upstream/downstream supports and endcaps: PFA Cartridge o-ring: TEE (Teflon® fluoropolymer encapsulated ethylene-propylene rubber) |
| Retention rating: |
40 μm |
| Media area: |
14000 cm2 (15.1 ft2) |
| Maximum operating conditions: |
Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) at 25°C Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSID) at 25°C Maximum operating temperature: 150°C (302°F) |
Fluorogard® RS-M Cartridge Filters
| Materials: |
Filtration media: PTFE prefiltration media and optimized PTFE membrane Upstream/downstream supports and endcaps: PFA O-rings: TEE (Teflon® fluoropolymer encapsulated ethylene-propylene rubber) |
| Retention rating: |
0.2 μm, 0.1 μm, 0.05 μm |
| Media area: |
6500 cm2 (14 ft2) |
| Maximum operating conditions: |
Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) at25°C Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSID) at 25°C Maximum operating temperature: 150°C (302°F) |
Fluorogard® RS-T Cartridge Filters
| Materials: |
Filtration Media: Optimized PTFE Upstream/downstream supports and endcaps: PFA O-rings: TEE (Teflon® fluoropolymer encapsulated ethylene-propylene rubber) |
| Retention rating: |
0.2 μm, 0.1 μm, 0.05 μm |
| Media area: |
13000 cm2 (14 ft2) |
| Maximum operating conditions: |
Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) at25°C Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSID) at 25°C Maximum operating temperature: 150°C (302°F) |
