Panelgard™ 334 PTFE Plus Cartridge Filters
High-flow cartridge filters designed for point-of-tool process fluid filtration in microelectronics industry applications.
●High flow and efficient particle removal ensure rapid particle removal in one-pass and recirculating applications
●PTFE Plus membranes are designed for stripper, IPA, or solvent applications
●Hydrophilic PTFE membrane eliminates the need for prewetting and flushing, saving time
High-flow cartridge filters designed for point-of-tool process fluid filtration in microelectronics industry applications.
●High flow and efficient particle removal ensure rapid particle removal in one-pass and recirculating applications
●PTFE Plus membranes are designed for stripper, IPA, or solvent applications
●Hydrophilic PTFE membrane eliminates the need for prewetting and flushing, saving time
Materials | Membrane | Hydrophobic PTFE, Hydrophilic PTFE |
Support, core, sleeve | PP | |
O-ring | EPDM, E-FKM (encapsulated fluoroelastomer) | |
Retention rating | Hydrophobic | 1, 3, 10 µm |
Hydrophilic | 0.1, 0.2, 0.5, 1, 3, 10 µm | |
Operating conditions | Maximum forward differential pressure | 0.41 MPa at 20°C (68°F) |
Maximum reverse differential pressure | 0.10 MPa at 20°C (68°F) | |
Maximum operating temperature | 80°C (176°F) | |
Dimensions (nominal) | Length | 267.7 mm (10.54") |
Diameter | 131.5 mm (5.18") |